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ArticleJ-GLOBAL ID:200902015674483820整理番号:88A0079144

クリーンルーム技術の開発 I 技研クリーンルームの概要と性能

Development of clean room technology. 1. Outline and performance of clean room in Technical Research Institute, Tobishima Corporation.

著者:菅原仁(飛島建設)
資料名:とびしま技報 建築 号:18 ページ:55-62
発行年:1987年10月
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