Contact resistance and surface composition of N-doped Al films.

SACEDON J L; AVILA J; FERNANDEZ M; FORT P; TERRAT J P

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J-GLOBAL ID：200902015674922751 Reference number：91A0023256

Contact resistance and surface composition of N-doped Al films.

NドープAl膜の接触抵抗と表面組成

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Material：
Volume： 41 Issue： 4/6 Page： 1215-1217 Publication year： 1990
JST Material Number： E0347A ISSN： 0042-207X Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Metallic thin films , 界面の電気的性質一般【’81~’92】

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