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ArticleJ-GLOBAL ID:200902015676058086整理番号:92A0807090

Normal-Incidence X-Ray Microscope for Carbon K.ALPHA. Radiation with 0.5.MU.m Resolution.

空間分解能が0.5μmの炭素Kα線用の垂直入射型X線顕微鏡

著者:MURAKAMI K(Nikon Corp., Tokyo)、OSHINO T(Nikon Corp., Tokyo)、NAKAMURA H(Nikon Corp., Tokyo)・・・
資料名:Jpn J Appl Phys Part 2 巻:31 号:10B ページ:L1500-L1502
発行年:1992年10月15日
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