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ArticleJ-GLOBAL ID:200902015682116330整理番号:90A0254288

Structural and superconducting properties of artificially superstructured MoN-TiN films.

人工超格子構造MON‐TiN膜の構造と超伝導特性

著者:KAWAGUCHI K(National Chemical Lab. Industry, Ibaraki, JPN)、SHIN S(National Chemical Lab. Industry, Ibaraki, JPN)
資料名:J Appl Phys 巻:67 号:2 ページ:921-929
発行年:1990年01月15日
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