Art
J-GLOBAL ID：200902015688820366   Reference number：93A0885200

A cylindrical tube based rapid thermal processor.

Author (6)：
CHAPMAN D T

About CHAPMAN D T

(North Carolina State Univ.)

About North Carolina State Univ.

, 
MELZAK J M

About MELZAK J M

(North Carolina State Univ.)

About North Carolina State Univ.

, 
FORDHAM M J

About FORDHAM M J

(North Carolina State Univ.)

About North Carolina State Univ.

, 
WORTMAN J J

About WORTMAN J J

(North Carolina State Univ.)

About North Carolina State Univ.

, 
OEZTUERK M C

About OEZTUERK M C

(North Carolina State Univ.)

About North Carolina State Univ.

, 
SORRELL R Y

About SORRELL R Y

(North Carolina State Univ.)

About North Carolina State Univ.


Material：
ULSI Science and Technology, 1991  (ULSI Sci Technol 1991)

About ULSI Science and Technology, 1991


Page： 582-591  Publication year： 1991 
JST Material Number： K19930520  Document type： Proceedings
Country of issue： United States (USA)  Language： ENGLISH (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
RaPID

About RaPID


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