Art
J-GLOBAL ID：200902015692481673
Reference number：86A0517397
Desorption of excited neutrals from surfaces via an electron attachment mechanism.
電子付着機構を介した表面からの励起中性粒子の脱離
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Author (1)：
Material：
Volume：
13
Issue：
1/3
Page：
545-549
Publication year：
Mar. 01, 1986
JST Material Number：
H0899A
ISSN：
0168-583X
Document type：
Article
Article type：
原著論文
Country of issue：
Netherlands (NLD)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Solid-gos interface in general.
, Sputtering
Terms in the title (4)：
Terms in the title
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