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ArticleJ-GLOBAL ID:200902015695710800整理番号:81A0415378

半導体製造技術の向上に対するESCAの実用化と問題点

著者:岩田誠一(日立 中研)
資料名:日本金属学会会報 巻:20 号:10 ページ:831-837
発行年:1981年10月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.