Art
J-GLOBAL ID:200902015696319420   Reference number:87A0193865

Silicon diaphragm accelerometer for industrial control.

工業計装制御用Siダイアフラム加速度計
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Material:
Volume: 1986  Page: 177-181  Publication year: 1986 
JST Material Number: A0946B  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measuring methods and instruments of time,speed,acceleration,angular veloc?  ,  Hydrid integrated circuit 
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