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ArticleJ-GLOBAL ID:200902015698738862整理番号:82A0455724

Plasma-enhanced metalorganic chemical vapor deposition of c-axis oriented and epitaxial films of ZnO at low substrate temperatures.

低基板温度におけるc軸配向およびエピタキシャルZnO膜のプラズマ増強有機金属化学蒸着

著者:SHIOSAKI T(Kyoto Univ.)、SHIMIZU M(Kyoto Univ.)、YAMAMOTO T(Kyoto Univ.)・・・
資料名:Proc IEEE Ultrason Symp 巻:1981 ページ:498-501
発行年:1981年
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