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ArticleJ-GLOBAL ID:200902015698769784整理番号:90A0222146

ホット・ウォール蒸着装置によるGaAs形成

Preparation of gaas films by hot-wall epitaxial equipment.

著者:長谷川茂(静岡県工技セ)、仲秋勇(静岡県工技セ)、山田修寧(静岡県工技セ)・・・
資料名:静岡県工業技術センター研究報告 号:34 ページ:179-180
発行年:1989年08月
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