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ArticleJ-GLOBAL ID:200902015701985400整理番号:92A0073708

NbN薄膜の磁界侵入長と常伝導抵抗率のスパッタ圧依存性

Dependences of the Magnetic Penetration Depth and the Resistivity of NbN Thin Films on the Sputtering Pressure.

著者:神代暁(電総研)、桐生昭吾(電総研)、東海林彰(電総研)・・・
資料名:応用物理学会学術講演会講演予稿集 巻:52nd 号:1 ページ:118
発行年:1991年10月
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