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ArticleJ-GLOBAL ID:200902015712877366整理番号:83A0013940

Gas mixing effect on ion current spectrum and its application to optimize implantation source gas composition.

イオン電流スペクトルに及ぼすガス混合効果とインプランテーション源のガス組成の最適化への応用

著者:IRITA Y(Electrical Communication Lab., Tokyo)、KAJIYAMA K(Electrical Communication Lab., Tokyo)
資料名:Jpn J Appl Phys Part 1 巻:21 号:4 ページ:633-635
発行年:1982年04月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.