Art
J-GLOBAL ID：200902015714274200
Reference number：84A0187550
Materialien fuer die Kathoden-Zerstaeubung.
陰極スパッタリング用材料
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Author (1)：
Material：
Volume：
33
Issue：
1
Page：
3-9
Publication year：
Feb. 1984
JST Material Number：
E0348A
ISSN：
0042-2266
CODEN：
VAKTA
Document type：
Article
Article type：
解説
Country of issue：
Germany, Federal Republic of (DEU)
Language：
GERMAN (DE)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition
Terms in the title (1)：
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