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ArticleJ-GLOBAL ID:200902015719682900整理番号:86A0036534

NbN formation on carbon fibers with a duo magnetron sputtering system.

デュオマグネトロンスパッタリング法で作製した炭素繊維におけるNbN形成

著者:OHSHIMA S(Kernforschungszentrum Karlsruhe, Federal Republic of Germany)、DIETRICH M(Kernforschungszentrum Karlsruhe, Federal Republic of Germany)、LINKER G(Kernforschungszentrum Karlsruhe, Federal Republic of Germany)
資料名:J Appl Phys 巻:57 号:3 ページ:890-896
発行年:1985年02月01日
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