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ArticleJ-GLOBAL ID:200902015719885372整理番号:89A0306124

50Hz ACスパッタ法によるBSCCO薄膜の作成とその素子への応用

Preparation of BSCCO thin films using 50Hz AC-sputtering and its application to junctions.

著者:中山明芳(神奈川大 工)、大久保正明(神奈川大 工)、吉田隆(神奈川大 工)・・・
資料名:電子情報通信学会全国大会講演論文集 巻:1989 号:Spring Pt.5 ページ:5.61
発行年:1989年03月
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