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ArticleJ-GLOBAL ID:200902015721371211整理番号:81A0295372

LPE growth of silicon from poly Si/Si structure using CW argon laser.

cwアルゴンレーザを用いた多結晶Si/Si構造からのシリコンのLPE成長

著者:MINAGAWA S(Stanford Univ., California)、LEE K F(Stanford Univ., California)、GIBBONS J F(Stanford Univ., California)・・・
資料名:J Electrochem Soc 巻:128 号:4 ページ:848-850
発行年:1981年04月
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