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ArticleJ-GLOBAL ID:200902015724313212整理番号:89A0453528

多元同時蒸着によるY‐Ba‐Cu‐O超伝導薄膜作成

Preparation of Y-Ba-Cu-O superconducting film according to the multiple simultaneous deposition process.

著者:真下啓治(古河電気工業 日光研)
資料名:月刊Semiconductor World 巻:8 号:9 ページ:87-90
発行年:1989年09月
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