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J-GLOBAL ID：200902015731673968
Reference number：92A0431944
Solid phase crystallization of LPCVD a-Si films prepared from Si2H6.
ジシランによるLPCVDa-Si膜の固相成長
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Author (5)：
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Material：
Volume：
39th
Issue：
Pt 2
Page：
615
Publication year：
Mar. 1992
JST Material Number：
Y0054A
Document type：
Proceedings
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
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