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ArticleJ-GLOBAL ID:200902015733794827整理番号:92A0006061

硬さ試験機を用いたTiN皮膜の密着性評価

Evaluation of adhesiveness of TiN film using hardness tester.

著者:山本潤一(長野県工試)、今井寛(丸真製作所)、江村秀樹(新光電気工業)・・・
資料名:長野県工業試験場研究報告 巻:10 ページ:51-57
発行年:1991年11月
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About J-GLOBAL

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