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ArticleJ-GLOBAL ID:200902015734113106整理番号:87A0034455

Comparative oxidation studies of SiC(0001) and SiC(0001) surfaces.

SiC(0001)とSiC(0001)表面酸化の比較研究

著者:MUEHLHOFF L(Univ. Pittsburgh, PA, USA)、BOZACK M J(Univ. Pittsburgh, PA, USA)、CHOYKE W J(Westinghouse Research & Development center, PA, USA)・・・
資料名:J Appl Phys 巻:60 号:7 ページ:2558-2563
発行年:1986年10月01日
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