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ArticleJ-GLOBAL ID:200902018976317023整理番号:87A0047812

In situ study of thin film growth by internal stress measurement under ultrahigh vacuum conditions : Silver and copper under the influence of oxygen.

超高真空条件下での内部応力測定による薄膜成長のその場研究 酸素の影響下の銀と銅

著者:ABERMANN R(Univ. Innsbruck, Innsbruck, AUT)、KOCH R(Univ. Innsbruck, Innsbruck, AUT)
資料名:Thin Solid Films 巻:142 号:1 ページ:65-76
発行年:1986年08月15日
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