Art
J-GLOBAL ID：200902018976317023   Reference number：87A0047812

In situ study of thin film growth by internal stress measurement under ultrahigh vacuum conditions : Silver and copper under the influence of oxygen.

超高真空条件下での内部応力測定による薄膜成長のその場研究 酸素の影響下の銀と銅
Author (2)：
ABERMANN R

About ABERMANN R

(Univ. Innsbruck, Innsbruck, AUT)

About Univ. Innsbruck, Innsbruck, AUT

, 
KOCH R

About KOCH R

(Univ. Innsbruck, Innsbruck, AUT)

About Univ. Innsbruck, Innsbruck, AUT


Material：
Thin Solid Films

About Thin Solid Films


Volume： 142  Issue： 1  Page： 65-76  Publication year： Aug. 15, 1986 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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silver

About silver

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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pressure dependence

About pressure dependence


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Metallic thin films 
(BK14030T)

About Metallic thin films

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
高真空

About 高真空

, 
応力測定

About 応力測定

, 
薄膜成長

About 薄膜成長

, 
研究

About 研究

, 
酸素

About 酸素

, 
銀

About 銀

, 
銅

About 銅


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