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ArticleJ-GLOBAL ID:200902019110987140整理番号:92A0225425

Thermal and photochemical decomposition pathways of AsH3 on GaAs(100): Implication for atomic layer epitaxy.

GaAs上のAsH3の熱的および光化学的分解の経路 原子層エピタクシーに対する関わり合い

著者:ZHU X‐Y(Univ. Texas, Texas)、WOLF M(Univ. Texas, Texas)、HUETT T(Univ. Texas, Texas)・・・
資料名:Appl Phys Lett 巻:60 号:8 ページ:977-979
発行年:1992年02月24日
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