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ArticleJ-GLOBAL ID:200902019144123799整理番号:82A0054417

超精密位置決め制御―半導体産業への応用

著者:照井隆夫(安川電機製作所東京工場)
資料名:計測技術 巻:10 号:1 ページ:94-99
発行年:1982年01月
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About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
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Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.