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ArticleJ-GLOBAL ID:200902023120839561整理番号:92A0191232

Characteristics of a Kilowatt-Plus Helium Microwave-Induced Plasma Utilizing 2- and 3-cm-Depth TM010 Resonator Cavities.

2cm深さと3cm深さの各TM010空胴共振器を用いるキロワット以上のヘリウムマイクロ波誘導プラズマの特性評価

著者:WU M(Northern Illinois Univ., Illinois)、CARNAHAN J W(Northern Illinois Univ., Illinois)
資料名:Appl Spectrosc 巻:46 号:1 ページ:162-168
発行年:1992年01月
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