Art
J-GLOBAL ID:200902023120839561   Reference number:92A0191232

Characteristics of a Kilowatt-Plus Helium Microwave-Induced Plasma Utilizing 2- and 3-cm-Depth TM010 Resonator Cavities.

2cm深さと3cm深さの各TM010空胴共振器を用いるキロワット以上のヘリウムマイクロ波誘導プラズマの特性評価
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Material:
Volume: 46  Issue:Page: 162-168  Publication year: Jan. 1992 
JST Material Number: A0429A  ISSN: 0003-7028  CODEN: APSPA  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Spectroanalysis 
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