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ArticleJ-GLOBAL ID:200902023122121250整理番号:88A0152533

オプトメカトロニクス時代の超精密切削技術 IV 超精密切削適用例―目的別 4・4 X線光学用各種ミラーの超精密切削

Ultra precision machinning of X-ray mirror. (8).

著者:小貫哲治(日本光学工業)、篠田守正(日本光学工業)、青木貞雄(筑波大 物理工学系)
資料名:光技術コンタクト 巻:26 号:1 ページ:59-70
発行年:1988年01月
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