オプトメカトロニクス時代の超精密切削技術 IV 超精密切削適用例-目的別 4・4 X線光学用各種ミラーの超精密切削
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Volume:
26
Issue:
1
Page:
59-70
Publication year:
Jan. 1988
JST Material Number:
S0624A
ISSN:
0913-7289
Document type:
Article
Article type:
解説
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
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