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ArticleJ-GLOBAL ID:200902023166398284整理番号:92A0316823

Atomic layer epitaxy of ZnS by a new gas supplying system in low-pressure metalorganic vapor phase epitaxy.

低圧有機金属気相エピタクシーにおける新しいガス供給システムによるZnSの原子層エピタクシー

著者:YAMAGA S(Chiba Univ., Chiba, JPN)、YOSHIKAWA A(Chiba Univ., Chiba, JPN)
資料名:J Cryst Growth 巻:117 号:1/4 ページ:152-155
発行年:1992年02月
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