Art
J-GLOBAL ID：200902023180691571   Reference number：83A0319241

複合カソードスパッタイオンポンプの特性

Author (3)：
OKANO TATSUO

About OKANO TATSUO

(東大生産技研)

About 東大生産技研

, 
OSAKI AKIHIKO

About OSAKI AKIHIKO

(東大生産技研)

About 東大生産技研

, 
TSUJI YUTAKA

About TSUJI YUTAKA

(東大生産技研)

About 東大生産技研


Material：
真空  (Journal of the Vacuum Society of Japan)

About 真空


Volume： 26  Issue： 5  Page： 369-371  Publication year： May. 1983 
JST Material Number： G0194A  ISSN： 0559-8516  CODEN： SHINA  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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ion pump(vacuum)

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,...
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negative electrode

About negative electrode


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Vacuum production and techniques 
(BA02020L)

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Reference (4)：
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複合カソード

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, 
スパッタイオンポンプ

About スパッタイオンポンプ


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