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ArticleJ-GLOBAL ID:200902023239890115整理番号:91A0576833

AlNセラミクスと薄膜導体の接合におよぼす熱処理の効果

The influence of heat treatment on joining between AlN ceramic and thin film conductor.

著者:安本恭章(東芝 総研)、山川晃司(東芝 総研)、岩瀬暢男(東芝 総研)・・・
資料名:日本セラミックス協会年会講演予稿集 巻:1991 ページ:20
発行年:1991年05月
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