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J-GLOBAL ID：200902023243727393   Reference number：87A0140201

Properties of polymer resists.

高分子レジストの性質
Author (4)：
SHINOZAKI D M

About SHINOZAKI D M

(Univ. Western Ontario, Ontario, CAN)

About Univ. Western Ontario, Ontario, CAN

, 
MCGOWAN J W

About MCGOWAN J W

(National Museum of Science and Technology, Ontario, CAN)

About National Museum of Science and Technology, Ontario, CAN

, 
CHENG P C

About CHENG P C

(Univ. Illinois at Chicago. IL, USA)

About Univ. Illinois at Chicago. IL, USA

, 
TAN K H

About TAN K H

(Univ. Wisconsin, WI, USA)

About Univ. Wisconsin, WI, USA


Material：
NATO ASI Series. B. Physics  (NATO ASI Ser B)

About NATO ASI Series. B. Physics


Volume： 137  Page： 191-214  Publication year： 1986 
JST Material Number： C0189B  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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polymer membrane

About polymer membrane

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
X-ray instruments and techniques 
(BA02060D)

About X-ray instruments and techniques

,  Thin films of organic compounds 
(BK14070L)

About Thin films of organic compounds

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (2)：
Terms in the title
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分子レジスト

About 分子レジスト

, 
性質

About 性質


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