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ArticleJ-GLOBAL ID:200902023275730990整理番号:83A0402712

Precipitation process design for denuded zone formation in CZ-silicon wafers.

CZシリコンウエハにおける裸領域形成の析出過程の設計

著者:HUBER D(Wacker Chemitronic, West Germany)、REFFLE J(Wacker Chemitronic, West Germany)
資料名:Solid State Technol 巻:26 号:8 ページ:137-143
発行年:1983年08月
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About J-GLOBAL

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