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ArticleJ-GLOBAL ID:200902023292740010整理番号:92A0778828

Spectropolarimatric determination of energy input into the near-electrode region of a low-pressure high-frequency capacitive discharge.

低圧高周波容量性放電の電極付近へのエネルギー注入の分光偏光学的決定

著者:DRACHEV A I(Leningrad State Univ.)、KAZANTSEV S A(Leningrad State Univ.)、RYS A G(Leningrad State Univ.)・・・
資料名:Opt Spectrosc 巻:71 号:6 ページ:527-530
発行年:1991年12月
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