Art
J-GLOBAL ID:200902023303120353
Reference number:82A0327483
Duennschichtsystem fuer Hybridschaltkreise - hergestellt durch Plasmatronzerstaeuben.
プラズマトロンスプレイ装置で製造した混成回路用薄膜
Author (6):
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Material:
Volume:
32
Issue:
3
Page:
105-108
Publication year:
1982
JST Material Number:
D0188A
ISSN:
0323-4657
Document type:
Article
Article type:
原著論文
Country of issue:
Germany, Federal Republic of (DEU)
Language:
GERMAN (DE)
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Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
JST classification (2):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, Hydrid integrated circuit
Terms in the title (3):
Terms in the title
Keywords automatically extracted from the title.
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