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ArticleJ-GLOBAL ID:200902023339902056整理番号:91A0369764

ペンタメトキシタンタルを蒸気源としたMOCVD法によるTa2O5薄膜の形成

著者:安春こう(東北大 大学院)、杉本克久(東北大 工)
資料名:日本金属学会講演概要 巻:108th ページ:473
発行年:1991年03月
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About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.