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J-GLOBAL ID：200902051196358493
Reference number：91A0832222
Integrated monochromator fabricated in silicon using micromachining techniques.
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Author (2)：
,
Material：
Page：
832-835
Publication year：
1991
JST Material Number：
K19910489
ISBN：
0-87942-586-5
Document type：
Proceedings
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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