Art
J-GLOBAL ID：200902051199134901   Reference number：88A0539463

Argon and oxygen sputter etching of polystyrene, polypropylene, and poly(ethylene terephthalate) thin films.

ポリスチレン,ポリプロピレンおよびポリ(エチレンテレフタレート)の薄膜のアルゴンおよび酸素によるスパッタエッチング
Author (3)：
GRANT J L

About GRANT J L

(3M Corporate Research, MN, USA)

About 3M Corporate Research, MN, USA

, 
DUNN D S

About DUNN D S

(3M Corporate Research, MN, USA)

About 3M Corporate Research, MN, USA

, 
MCCLURE D J

About MCCLURE D J

(3M Corporate Research, MN, USA)

About 3M Corporate Research, MN, USA


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 6  Issue： 4  Page： 2213-2220  Publication year： Jul. 1988 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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polystyrene

About polystyrene

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
IRAS

About IRAS

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Sputtering 
(BK16110U)

About Sputtering

,  Reaction of polymers with low molecular weight compounds 
(CG03020L)

About Reaction of polymers with low molecular weight compounds

Terms in the title (8)：
Terms in the title
Keywords automatically extracted from the title.
ポリスチレン

About ポリスチレン

, 
ポリプロピレン

About ポリプロピレン

, 
エチレン

About エチレン

, 
テレフタレート

About テレフタレート

, 
薄膜

About 薄膜

, 
アルゴン

About アルゴン

, 
酸素

About 酸素

, 
スパッタエッチング

About スパッタエッチング


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