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ArticleJ-GLOBAL ID:200902051207718250整理番号:91A0888708

超音波顕微鏡によるSAWフィルタ用ガラス基板の評価

Evaluation of Glass Substrates for SAW Filters by Acoustic Microscopy Technique.

著者:門田道雄(村田製作所)、北村武(村田製作所)、笠次徹(村田製作所)
資料名:電気学会論文誌 C 巻:111 号:9 ページ:412-418
発行年:1991年09月
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