Art
J-GLOBAL ID：200902051268569338   Reference number：86A0057465

Ellipsometric studies of silicon dioxide films on silicon.

けい素上の二酸化けい素膜のエリプリメトリー
Author (2)：
YAGHMOUR S

About YAGHMOUR S

(Univ. Aston, Gt Britain)

About Univ. Aston, Gt Britain

, 
NEAL W E J

About NEAL W E J

(Univ. Aston, Gt Britain)

About Univ. Aston, Gt Britain


Material：
Surface Technology  (Surf Technol)

About Surface Technology


Volume： 25  Issue： 4  Page： 297-305  Publication year： Aug. 1985 
JST Material Number： D0205C  ISSN： 0376-4583  Document type： Article
Article type： 原著論文  Country of issue： Switzerland (CHE)  Language： ENGLISH (EN)
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ellipsometry

About ellipsometry

,...
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JST classification (1)：
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Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (2)：
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けい素

About けい素

, 
酸化けい素膜

About 酸化けい素膜


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