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ArticleJ-GLOBAL ID:200902051323858042整理番号:88A0194850

光学系の設計技術 ステッパーの光学系

Optical system design technology. Optical system of steppers.

著者:松尾誠之助(シチズン時計)
資料名:センサ技術 巻:8 号:4 ページ:92-95,91
発行年:1988年03月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
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Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.