Art
J-GLOBAL ID:200902051405755942   Reference number:92A0338769

Thermal stability and the failure mechanism of the Al/W76N24/Au metallization.

Al/W76N24/Auメタライゼーションの熱安定性と破壊機構
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Volume: 208  Issue:Page: 33-37  Publication year: Feb. 10, 1992 
JST Material Number: B0899A  ISSN: 0040-6090  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Metallic thin films  ,  Diffusion in metals 
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