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J-GLOBAL ID:200902131008493803   Reference number:97A0560196

High quality diamond like carbon thin film fabricated by ECR plasma CVD.

ECRプラズマCVD法で作製した高品質ダイヤモンド状炭素薄膜
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Volume: 113/114  Page: 227-230  Publication year: Apr. 1997 
JST Material Number: B0707B  ISSN: 0169-4332  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 

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