Temperature Monitoring with a Fully Integrable on Chip Interferometric Silicon Micro-sensor Based on the Thermo-optic Effect.

COCORULLO G; DELLA CORTE F G; IODICE M; RENDINA I; SARRO P M

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J-GLOBAL ID：200902131010093723 Reference number：97A0079248

Temperature Monitoring with a Fully Integrable on Chip Interferometric Silicon Micro-sensor Based on the Thermo-optic Effect.

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Page： 1321-1323 Publication year： 1996
JST Material Number： K19960675 ISBN： 0-7803-3110-9 Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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