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J-GLOBAL ID:200902131011056244   Reference number:02A0440688

光電気化学エッチングによるSiCの評価

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Volume: 49th  Issue:Page: 423  Publication year: Mar. 27, 2002 
JST Material Number: Y0054A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Techniques for samples  ,  Surface structure of semiconductors 
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