Improvement of asymmetric profile of Ti, TiN ECR CVD film. (1). Ti CVD.

MIYAMOTO TAKAAKI; KAWASHIMA ATSUSHI; KADOMURA SHINGO; AOYAMA JUN'ICHI

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J-GLOBAL ID：200902131016450285 Reference number：97A0503904

Improvement of asymmetric profile of Ti, TiN ECR CVD film. (1). Ti CVD.

Ti,TiN ECR CVD膜のステップカバレッジ非対称性の改善 (1) Ti CVD

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Material：
Volume： 44th Issue： 2 Page： 799 Publication year： Mar. 1997
JST Material Number： Y0054A Document type： Proceedings
Country of issue： Japan (JPN) Language： JAPANESE (JA)

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