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ArticleJ-GLOBAL ID:200902131016999945整理番号:96A0165743

Unconnected junction contrast in ion beam induced charge microscopy.

イオンビーム誘起電荷顕微鏡法における非連結接合コントラスト

著者:KOLACHINA S(National Univ. Singapore, Singapore)、ONG V K S(National Univ. Singapore, Singapore)、CHAN D S H(National Univ. Singapore, Singapore)・・・
資料名:Appl Phys Lett 巻:68 号:4 ページ:532-534
発行年:1996年01月22日
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About J-GLOBAL

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