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J-GLOBAL ID:200902131016999945   Reference number:96A0165743

Unconnected junction contrast in ion beam induced charge microscopy.

イオンビーム誘起電荷顕微鏡法における非連結接合コントラスト
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Volume: 68  Issue:Page: 532-534  Publication year: Jan. 22, 1996 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Transistors 
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