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ArticleJ-GLOBAL ID:200902131018864087整理番号:00A0688907

ナノCMMレーザトラッピングプローブに関する研究 1 3次元位置検出の基本原理

The Laser Trapping Probe for Nano-CMM. (1st Report). Positional Detection Principle of the Laser Trapping Probe and Its Nature.

著者:高谷裕浩(大阪大 大学院)、佐藤憲章(オムロン)、高橋哲(大阪大 大学院)・・・
資料名:精密工学会誌 巻:66 号:7 ページ:1081-1086
発行年:2000年07月05日
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