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ArticleJ-GLOBAL ID:200902131020387490整理番号:94A0475935

マイクロ波負イオン源による酸素負イオンビームの生成

Production of Oxygen Negative Ion Beam by Microwave Negative Ion Source.

著者:田中政信(日立 日立研)、小林一夫(日立 日立研)、三宅潔(日立 日立研)・・・
資料名:応用物理学関係連合講演会講演予稿集 巻:41st 号:Pt 2 ページ:519
発行年:1994年03月
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About J-GLOBAL

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