Art
J-GLOBAL ID：200902131021817162
Reference number：98A0481856
The vibratory characterization of silicon cantilever with sputtered piezoelectric thin film.
圧電薄膜が形成された片持ち梁の振動特性
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Author (4)：
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,
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Material：
Volume：
45th
Issue：
1
Page：
464
Publication year：
Mar. 1998
JST Material Number：
Y0054A
Document type：
Proceedings
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
,
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