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ArticleJ-GLOBAL ID:200902131021817162整理番号:98A0481856

圧電薄膜が形成された片持ち梁の振動特性

The vibratory characterization of silicon cantilever with sputtered piezoelectric thin film.

著者:高田英一(村田製作所)、小中義宏(村田製作所)、小林真司(村田製作所)・・・
資料名:応用物理学関係連合講演会講演予稿集 巻:45th 号:1 ページ:464
発行年:1998年03月
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