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ArticleJ-GLOBAL ID:200902131024236322整理番号:96A0895859

Rapid solid phase crystallization of nanocrystalline silicon deposited by electron cyclotron plasma chemical vapor deposition.

電子サイクロトロンプラズマ化学蒸着で蒸着したナノ結晶シリコンの急速固相結晶化

著者:HOLGADO S(Univ. Autonoma de Madrid, Madrid, ESP)、MARTINEZ J(Univ. Autonoma de Madrid, Madrid, ESP)、GARRIDO J(Univ. Autonoma de Madrid, Madrid, ESP)・・・
資料名:Appl Phys Lett 巻:69 号:13 ページ:1873-1875
発行年:1996年09月23日
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