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ArticleJ-GLOBAL ID:200902131028161807整理番号:96A1002416

Switched-Voltage Control of Electrostatic Levitation System.

静電浮上システムのスイッチド電圧制御

著者:WOO S J(神奈川科学技術アカデミー)、JEON J U(神奈川科学技術アカデミー)、HIGUCHI T(Univ. Tokyo)
資料名:精密工学会大会学術講演会講演論文集 巻:1996 号:Autumn 3 ページ:747-748
発行年:1996年08月
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About J-GLOBAL

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