Art
J-GLOBAL ID:200902131031727048   Reference number:02A0633430

Series Resistance Calculation for Source/Drain Extension Regions Using 2-D Device Simulation.

2-Dデバイスシミュレーションを用いた,ソース/ドレイン延在領域に対する直列抵抗値の計算
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Volume: 49  Issue:Page: 1219-1226  Publication year: Jul. 2002 
JST Material Number: C0222A  ISSN: 0018-9383  CODEN: IETDAI  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Transistors 
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